EM-30N
Coxem
The EM-30N is our most popular model of tungsten filament-based Tabletop SEM. Featuring our 5th generation DSP (Digital Signal Processing) technology it delivers crystal-clear, low noise images even at high magnification. Panorama Mode allows delivers wide-area scanning capability, while LV (Low Vacuum) gives you the ability to capture pristine, high-quality images of non-conductive samples without coating. The EM-30N is also the world’s first tabletop SEM that seamlessly integrates with compact EBSD, further elevating its versatility and performance.Specifications
Electron gun |
Tungsten filament (W) |
---|---|
Spatial resolution |
< 5nm |
Photo magnification |
15x to 150,000x |
Display magnification |
15x to 150,000x |
Accelerating voltage |
1 ~ 30kV |
Sample stage |
X : 35mm, Y : 35mm, Tilt : 0 ~ 45° |
Detector | SE, BSE* |
Vacuum mode |
HV, LV* |
Vacuum system |
Turbo pump (80L) + Rotary pump (100L) |
Dimension (W × L × H) |
400(W) × 630(L) × 600(H)mm |
Weight |
85kg |
Features |
Panorama v1 Auto focus Auto brightness & contrast Auto start Signal mixing Dual display & Save Line profile Image filtering Annotation tool ChamberCam |
Data output format |
JPEG, TIFF, BMP |
Options* |
BSE, EDS, EBSD, STEM NaviCam, Coolstage LV (20Pa), VP (10 / 20 / 30Pa) Panorama v2, NanofiberScanner Diaphragm pump |