EM-30N
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EM-30N

Coxem

The EM-30N is our most popular model of tungsten filament-based Tabletop SEM. Featuring our 5th generation DSP (Digital Signal Processing) technology it delivers crystal-clear, low noise images even at high magnification. Panorama Mode allows delivers wide-area scanning capability, while LV (Low Vacuum) gives you the ability to capture pristine, high-quality images of non-conductive samples without coating. The EM-30N is also the world’s first tabletop SEM that seamlessly integrates with compact EBSD, further elevating its versatility and performance.






Specifications

Electron gun

Tungsten filament (W)

Spatial resolution

< 5nm

Photo magnification

15x to 150,000x

Display magnification

15x to 150,000x

Accelerating voltage

1 ~ 30kV

Sample stage

X : 35mm, Y : 35mm,

Tilt : 0 ~ 45°

Detector SE, BSE*

Vacuum mode

HV, LV*

Vacuum system

Turbo pump (80L) + Rotary pump (100L)

Dimension (W × L × H)

400(W) × 630(L) × 600(H)mm

Weight

85kg

Features

Panorama v1

Auto focus

Auto brightness & contrast

Auto start

Signal mixing

Dual display & Save

Line profile

Image filtering

Annotation tool

ChamberCam

Data output format

JPEG, TIFF, BMP

Options*

BSE, EDS, EBSD, STEM

NaviCam, Coolstage

LV (20Pa), VP (10 / 20 / 30Pa)

Panorama v2, NanofiberScanner

Diaphragm pump