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J.A. Woolam

For routine measurements of thin film thickness and refractive index, this ellipsometer allows you to mount a sample, choose the model that matches your film, and press “measure”. You have results within seconds.

Features and Specifications


Dielectric Films: With fast measurement speed and push-button operation, the alpha-SE® is ideal for qualifying thin films. Single-layer dielectrics on silicon or glass substrates can be measured in seconds. Log results for easy-to-use comparisons in both graphical and tabular formats.
Self-Assembled Monolayers: Phase information of a spectroscopic ellipsometry measurement is highly sensitive to very thin films (<10nm).  Self-assembled monolayers can be assessed and quickly compared using the alpha-SE.
Absorbing Films: Advanced models provide quick and efficient fits for a wide variety of materials you may encounter.
Coating on Glass: Patented technology allows accurate measurements on any substrate: metal, semiconductor, or glass. On transparent substrates, the alpha-SE® measures depolarization to correct for light returning from the backside of the substrate. This unwanted light can confuse other ellipsometers, but the alpha-SE® ensures accurate optical constants.


500µL Liquid Cell

500µL liquid capacity
70° angle of incidence
Designed for glass slides & 1” or 2” wafers


Tilt stage designed to hold Q-Sense QCM-D Quartz Crystal Microbalance (E-Series with E1 Chamber)

Transmission Mount

Holds sample vertically in the path of light beam to allow normal incidence transmission measurements.