MicroWriter ML3 Baby
Durham Magneto OpticsConventional approaches to photolithography are usually based on exposing through a chromium-glass mask manufactured by specialist vendors. In R&D environments it is often necessary to change the mask design frequently. Direct-write laser lithography overcomes this problem by holding the mask in software. Rather than projecting light through a physical mask, direct-write laser lithography rasters the sample beneath a number of computer-controlled lasers, each pulsing on and off in order draw the pattern to be exposed directly onto the photoresist
MicroWriter Baby is the smallest and lowest-cost optical lithography machine in the world and is designed to offer unprecedented value for money and small laboratory footprint. With a footprint of only 45cm x 45cm, it sits on a standard laboratory bench or desk and plugs into a laptop computer. Its only service requirement is a standard power socket – no pumps or compressors are needed and it is almost silent in operation. It is a Class 1 laser product and so can be used in an open laboratory environment without special laser safety measures. Easy to use Windows based software means most exposures can be set up and launched with just a few mouse clicks.
Features and Specifications149mm x 149mm maximum writing area; 155mm x 155mm maximum wafer size.
1µm resolution across full writing area.
405nm long-life semiconductor laser; 375nm available as option.
Up to 6 square mm/minute writing speed (2µm pixel size).
Ultra-fast 120 square mm/minute ´turbo´ writing available as option.
Autofocus system using focused red laser – no minimum wafer size.
Zooming optical microscope (1µm resolution) with CCD camera for alignment to lithographic markers on the wafer (±2µm alignment accuracy).
Grey scale exposure mode for 3-dimensional patterning.
Acceptable file formats: CIF, BMP, TIFF.
Machine footprint: 450mm x 450mm (excluding laptop computer).
Designed for desktop use – no optical table required.
Easy to use, Windows based control software supplied.
Supplied with pre-configured Windows 7/8 laptop computer for ´plug and play´ installation.
Extremely competitively priced for University and industrial R&D budgets.
ApplicationsMicroelectronics and semiconductor devices
MEMS / NEMS
Microfluidics and lab-on-a-chip
Graphene and other 2-dimensional materials
Options375nm writer (replace 405 nm lightsource)
Clewin 5 mask design software
Virtual mask aligher