RC2

Applications

Low bandgap semiconductors


The RC2 can cover wavelengths from the ultraviolet to the near infrared. For compound semiconductor thin films, this allows coverage of photon energies down to 0.5 eV and up to 6 eV. The low-energy region can show the bandgap of the material, while the high energy shows the absorptions caused by other electronic transitions.



Conductive Organics


Great progress has occurred in the area of organic layers and stacks used for display (OLED) or photovoltaic applications. There are many different materials being studied, from small molecules such as Alq3 to conjugated polymers such as P3HT. Often multiple materials are blended together which requires the wide spectral range of the RC2 - to probe different wavelengths where the organics are optically different. Long-chain molecules may also have significant anisotropy, where orientational stacking of the polymer chains produces different optical constants in different directions.



Display Applications


Measurements of a-Si, poly-Si, microcrystalline-Si, OLED layers, color filters, ITO, MgO, polyimide, and liquid crystals are beneficial during display R&D and production.



Anisotropic Applications


Complete Mueller Matrix: The RC2® can characterize the full Mueller matrix of a sample. This advanced data type ensures appropriate characterization of complex samples that are both anisotropic and depolarizing.



Liquid Crystals


Twisted nematic liquid crystal films introduce the complexity of an aniso-tropic film with a smoothly varying optical axis orientation. MM-SE is the best choice for thick liquid crystal layers sandwiched between glass substrates as depolarization and anisotropy effects will both exist.

Features

Dual Rotating Compensators: The RC2 uses synchronous rotation of two compensators (both before and after the sample) to provide high accuracy, fast measurement speed, and advanced measurements including the complete Mueller matrix.

Achromatic Compensator Design: Patented achromatic compensators provide optimized performance over a wide spectral range from the ultraviolet to the near infrared.

Advanced Light Source: Next-generation light source includes computer-controlled beam intensity to automatically optimize the signal on any sample (low or high reflection).

Innovative Spectrometer: Next-generation spectrometer collects over 1000 wavelengths simultaneously. Advanced silicon CCD is combined with an InGaAs diode array - both designed to reduce bandwidth which improves measurement of sharp data features.

Novel Beam Alignment: With the RC2, we have "re-thought" how beam alignment should be achieved. Multiple position-sensitive detectors along the beam path help ensure the system (and sample) are always well-aligned for highest data accuracy.

New Extended NIR Spectrometer: The RC2 is the first commercial ellipsometer to use the latest thermoelectric (TE) cooled, strained InGaAs array to collect hundreds of wavelengths in the infrared out to 2500 nm.

Excellent Data Quality: The advanced RC2 technology provides very high data accuracy. A test measurement of air (straight-through) produces diagonal Mueller matrix values = 1.002 and off-diagonal Mueller matrix values = 0 ±.002.

Specifications

Patented dual rotating compensator ellipsometer with simultaneous CCD detection of all wavelengths, flexible system configuration.

Measurement Capabilities
• Spectroscopic Ellipsometry (SE): Psi and Delta over their full range.
• Generalized SE: Complete 2x2 Jones matrix for anisotropic samples.
• Mueller Matrix SE: All 16 elements of the 4x4 Mueller matrix.
• Depolarization: Measure and model the non-ideal nature of your sample.
• Intensity: Both reflectance and transmit-tance, including anisotropic terms such as like-and cross-polarized intensities.

Wavelength Range
U, X: 210-1000 nm 790 wvls.
D: 193-1000 nm 800 wvls.
UI, XI: 210-1690 nm 1065 wvls.
DI: 193-1690nm 1075 wvls.
XI+: 210-2500 nm 1065 wvls.

Data Acquisition Rate
Measure complete spectrum in 1/3 of a second - even for advanced data types!

Angle Range
Fixed Angle: 65°
Horz. Auto Angle: 45°-90°
Vert. Auto Angle: 20°-90°

Options

Mapping & Rotation


Fully automated sample translation or rotation. Map thin film uniformity of wafers or glass panels. Rotator useful for anisotropic material characterization.



Auto-Align, Camera & Focused Spot


Fully automated sample alignment to adjust tip-tilt-z. Focused spot size with camera for patterned features.



Liquid & Temperature Studies


Study your thin films in a liquid environment or with adjustable temperature in one of our many cells.



Environmental Studies


Control the sample environment to study porous materials.