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Ultra High Vacuum (UHV) Micromanipulated Probe Stations
Janis
Janis offers a complete range of probe stations suitable for making electrical measurements in a UHV environment. Several standard designs are available, and systems can be custom configured to meet a wide variety of user requirements.Standard Configuration

Typical UHV probe stations include:
• All stainless steel vacuum chamber with metal sealed flanges (CF)
• UHV rated electrical feedthroughs and electrical probes
• UHV rated optical viewport
• Fully bakeable to 120 °C
• Room temperature or cryogenic configurations
• Sample size 25 – 50 mm diameter.
• 2 – 8 integrated x-y-z probe manipulators, with electrical probes installed
• Temperature range from 5 – 675 K available
• Monoscope, camera, and monitor for viewing samples and probes
Probe Station Options include
• Larger diameter vacuum chamber and sample mount• Load lock option for sample exchange without opening the chamber
• Integrated UHV turbopump for maximum pumping speed and lowest base pressure
• Vibration isolated stand
• Special miniature vacuum chamber to transfer sample under vacuum from Glove Box to Probe Station


Probe Station Specifications
Operating Temperature |
5 K - 700 K |
Sample Size |
25 - 50 mm diameter (100 mm optional) |
Vibration Level |
<1 micron |
Probe Coverage |
14 - 50 mm diameter (100 mm optional) |
Other Configurations
Probe Station for Ultra High Vacuum EnvironmentFour Probe High Vacuum Room Temperature Probe Station
Close up of Sample Area on Ultra High Vacuum Probe Station