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µAligner

Mutech Microsystems

Mutech offers projects, systems and equipment for the promotion of science, technology and education in the areas of microfabrication, micro and nano mechanics and electronics. The company is interested in promoting, through the development and commercialization of high-tech equipment, the training of quality human resources, to simplify the generation of new knowledge and to improve the access of the productive sector to new technology.

µAligner is a compact high value UV mask aligner designed for microfabrication applications. It allows for easy fabrication of multilayer devices on a multitude of photoresists, with excellent exposure quality. The easy to use, 7 inch touchscreen based control allows the user to align using the calibrated digital microscope and the X-Y-R micrometer based alignment stage. The fully electronic wafer pressure and gap control allows for easy alignment and very high repeatability of the exposure conditions between processes.

Specifications

Mechanics
X-Y-R Aligning stage
Type of control	Mechanical, micrometer based
Accuracy	1µm
X-Y alignment span	6mm
R alignment span	5°
Z Wafer stage
Type of control	Motorized
Stage step	0.31µm/step
Pressure sensing resolution	20g
Maximum pressure	5kg
60mm rotary encoder for precise gap/pressure control
Wafer pressure sensing with live feedback for high repeatability between processes
Interchangeable vacuum based photomask holders for 2”,3”,4”,5” square photomasks and microscope slides

UV Optics
Wavelength	365nm
Exposure time	0.1 - 200 s
Exposure area	100mm diameter
Power density	0.2 - 20 mW/cm^2
Homogeneity	< 5%
Light divergence	< 3°
Motorized motion between aligning and exposure modes

Microscope
Camera resolution	1920x1080
Auxiliary illumination	590nm coaxial yellow LED
Field illumination mode	Clear field illumination
Alignment technique	Top-side alignment, single camera
Motion	3 axis, independent XYZ manual stage
Included objectives
Objective	Effective magnification on screen
Low mag	90x
Medium mag	315x
High mag	480x

Electronics
Display	7” full color LCD
User control	Capacitive touchscreen for machine controls and microscope.
32 Bits ARM cortex based integrated computer for maximum compactness

Dimensions
Size	350x490x470 mm
Weight	19kg
Power	110v/220v 250W

Features

365nm Wavelength
Long life cold LED source with no warm up
Very low divergence and high homogeneity
Full hd calibrated digital microscope with 590nm coaxial yellow illumination
Electronic wafer pressure and gap control
Micrometer based X-Y-R wafer aligning stage
7 inch capacitive touchscreen based control
Up to 5 inch photomasks with interchangeable mask holders
100mm diameter UV aperture

Applications

The microAligner is ideal for the fabrication of high level systems for research applications. Main applications range from microfluidics, optics and biotechnology to microelectronic devices.

It provides the user with fast multilayer device fabrication capabilities thanks to its high resolution and high accuracy alignment.

LED source

The microAligner, compact mask aligner has very low maintenance requirements thanks to its LED based souce. It provides 365nm UV light with a very long life, no warmup times, instant turn on and no heat, with excellent homogeneity and low divergence.

PDFs

Microaligner