Ultra High Vacuum (UHV) Micromanipulated Probe Stations

Standard Configuration

Janis offers a complete range of probe stations suitable for making electrical measurements in a UHV environment. Several standard designs are available, and systems can be custom configured to meet a wide variety of user requirements. Janis has been manufacturing UHV compatible systems for over 50 years, and we apply this extensive experience to the design of every UHV probe station.
Typical UHV probe stations include:
• All stainless steel vacuum chamber with metal sealed flanges (CF)
• UHV rated electrical feedthroughs and electrical probes
• UHV rated optical viewport
• Fully bakeable to 120 °C
• Room temperature or cryogenic configurations
• Sample size 25 – 50 mm diameter.
• 2 – 8 integrated x-y-z probe manipulators, with electrical probes installed
• Temperature range from 5 – 675 K available
• Monoscope, camera, and monitor for viewing samples and probes

Probe Station Options include

• Larger diameter vacuum chamber and sample mount
• Load lock option for sample exchange without opening the chamber
• Integrated UHV turbopump for maximum pumping speed and lowest base pressure
• Vibration isolated stand
• Special miniature vacuum chamber to transfer sample under vacuum from Glove Box to Probe Station

Other Configurations

Probe Station for Ultra High Vacuum Environment
Four Probe High Vacuum Room Temperature Probe Station
Close up of Sample Area on Ultra High Vacuum Probe Station