µAligner
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µAligner

Mutech Microsystems

Mutech offers projects, systems and equipment for the promotion of science, technology and education in the areas of microfabrication, micro and nano mechanics and electronics. The company is interested in promoting, through the development and commercialization of high-tech equipment, the training of quality human resources, to simplify the generation of new knowledge and to improve the access of the productive sector to new technology.

µAligner is a compact high value UV mask aligner designed for microfabrication applications. It allows for easy fabrication of multilayer devices on a multitude of photoresists, with excellent exposure quality. The easy to use, 7 inch touchscreen based control allows the user to align using the calibrated digital microscope and the X-Y-R micrometer based alignment stage. The fully electronic wafer pressure and gap control allows for easy alignment and very high repeatability of the exposure conditions between processes.

Specifications



Mechanics

X-Y-R Aligning stage

Type of control

Mechanical, micrometer based

Accuracy

1µm

X-Y alignment span

6mm

R alignment span

Z Wafer stage

Type of control

Motorized

Stage step

0.31µm/step

Pressure sensing resolution

20g

Maximum pressure

5kg

60mm rotary encoder for precise gap/pressure control

Wafer pressure sensing with live feedback for high repeatability between processes

Interchangeable vacuum based photomask holders for 2”,3”,4”,5” square photomasks and microscope slides



UV Optics

Wavelength

365nm

Exposure time

0.1 - 200 s

Exposure area

100mm diameter

Power density

0.2 - 20 mW/cm^2

Homogeneity

< 5%

Light divergence

< 3°

Motorized motion between aligning and exposure modes



Microscope

Camera resolution

1920x1080

Auxiliary illumination

590nm coaxial yellow LED

Field illumination mode

Clear field illumination

Alignment technique

Top-side alignment, single camera

Motion

3 axis, independent XYZ manual stage

Included objectives

Objective

Effective magnification on screen

Low mag

90x

Medium mag

315x

High mag

480x



Electronics

Display

7” full color LCD

User control

Capacitive touchscreen for machine controls and microscope.

32 Bits ARM cortex based integrated computer for maximum compactness



Dimensions

Size

350x490x470 mm

Weight

19kg

Power

110v/220v 250W

Features

  • 365nm Wavelength
  • Long life cold LED source with no warm up
  • Very low divergence and high homogeneity
  • Full hd calibrated digital microscope with 590nm coaxial yellow illumination
  • Electronic wafer pressure and gap control
  • Micrometer based X-Y-R wafer aligning stage
  • 7 inch capacitive touchscreen based control
  • Up to 5 inch photomasks with interchangeable mask holders
  • 100mm diameter UV aperture

Applications

The microAligner is ideal for the fabrication of high level systems for research applications. Main applications range from microfluidics, optics and biotechnology to microelectronic devices.

It provides the user with fast multilayer device fabrication capabilities thanks to its high resolution and high accuracy alignment.



LED source

The microAligner, compact mask aligner has very low maintenance requirements thanks to its LED based souce. It provides 365nm UV light with a very long life, no warmup times, instant turn on and no heat, with excellent homogeneity and low divergence.