µCoater
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µCoater

Mutech Microsystems

Mutech offers projects, systems and equipment for the promotion of science, technology and education in the areas of microfabrication, micro and nano mechanics and electronics. The company is interested in promoting, through the development and commercialization of high-tech equipment, the training of quality human resources, to simplify the generation of new knowledge and to improve the access of the productive sector to new technology.

µCoater is a very easy to use and full of features benchtop spin coater, it includes an integrated vacuum system with a rotating vacuum chuck for holding the substrates to coat while spinning. You don't need an external vacuum pump. it's integrated inside. It has an all metal body construction (steel and aluminum) with a polypropylene vacuum chuck, the inside of the spinning bowl is coated with a PTFE based material which is very easy to clean. It uses a high quality outrunner brushless motor. These type of motors are very efficient and have very low static friction resulting in a long lifetime.

Specifications

Rotation

Maximum speed

10000 rpm

Minimum speed

500 rpm

Maximum acceleration

5000 rpm/s

Maximum time per step

3000 s

Vacuum system and mechanics

Vacuum pump

Integrated

Vacuum chuck o-ring diameter

36 mm

Vacuum chuck external diameter

45 mm

Spinning bowl internal diameter

180 mm

Included chuck adapters (others can be provided)

3.5mm, 8mm, 22mm

Memory

Programs

10

Steps per program

Up to 7

Content of each step

Speed, Acceleration and time

Materials

Frame

Sheet steel/Polyurethane paint

Bowl

Aluminum/PTFE coating

Lid

Glass

Chuck and chuck accessories

Polypropylene

Features

  • Integrated vacuum chuck and pump
  • TFT-LCD full color graphical user interface
  • Context-based navigation with buttons and a rotary encoder
  • Outrunner brushless motor
  • 8mm hole on the center of the glass lid that can be used for dispensing
  • PTFE coated spinning bowl for easier cleaning
  • Sample size capacity: from 5x5mm fragments up to 4 inch wafers

Options

We also offer a variety of different adapters, accessories and custom developments for our customers, in case you need a specific modification to suit your application please contact us to discuss available options.

Aluminum main chuck and adapters



Extra PP adapters



PP adapter for ophthalmic lenses



Advantages

Integrated vacuum



The µCoater has a vacuum chuck with a pump inside its body. You don't need external connections other than the power plug, making it ideal for a glovebox.

Brushless motor



This kind of motor is very reactive and efficient, allowing for a smaller overall design and higher speeds and accelerations.

Easy to use user interface



The full color LCD screen allows for a very intuitive usage of the µCoater.