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µCoater
Mutech Microsystems
Mutech offers projects, systems and equipment for the promotion of science, technology and education in the areas of microfabrication, micro and nano mechanics and electronics. The company is interested in promoting, through the development and commercialization of high-tech equipment, the training of quality human resources, to simplify the generation of new knowledge and to improve the access of the productive sector to new technology.µCoater is a very easy to use and full of features benchtop spin coater, it includes an integrated vacuum system with a rotating vacuum chuck for holding the substrates to coat while spinning. You don't need an external vacuum pump. it's integrated inside. It has an all metal body construction (steel and aluminum) with a polypropylene vacuum chuck, the inside of the spinning bowl is coated with a PTFE based material which is very easy to clean. It uses a high quality outrunner brushless motor. These type of motors are very efficient and have very low static friction resulting in a long lifetime.
Features
• Integrated vacuum chuck and pump• TFT-LCD full color graphical user interface
• Context-based navigation with buttons and a rotary encoder
• Outrunner brushless motor
• 8mm hole on the center of the glass lid that can be used for dispensing
• PTFE coated spinning bowl for easier cleaning
• Sample size capacity: from 5x5mm fragments up to 4-inch wafers
Specifications
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Rotation |
|
|
Maximum speed |
10000 rpm |
|
Minimum speed |
500 rpm |
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Maximum acceleration |
5000 rpm/s |
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Maximum time per step |
3000 s |
|
Vacuum system and mechanics |
|
|
Vacuum pump |
Integrated |
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Vacuum chuck o-ring diameter |
36 mm |
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Vacuum chuck external diameter |
45 mm |
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Spinning bowl internal diameter |
180 mm |
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Included chuck adapters (others can be provided) |
3.5mm, 8mm, 22mm |
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Memory |
|
|
Programs |
10 |
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Steps per program |
Up to 7 |
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Content of each step |
Speed, Acceleration and time |
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Materials |
|
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Frame |
Sheet steel/Polyurethane paint |
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Bowl |
Aluminum/PTFE coating |
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Lid |
Glass |
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Chuck and chuck accessories |
Polypropylene |
Options
We also offer a variety of different adapters, accessories and custom developments for our customers, in case you need a specific modification to suit your application please contact us to discuss available options.
