View in
µExposer
Mutech Microsystems
Mutech offers projects, systems and equipment for the promotion of science, technology and education in the areas of microfabrication, micro and nano mechanics and electronics. The company is interested in promoting, through the development and commercialization of high-tech equipment, the training of quality human resources, to simplify the generation of new knowledge and to improve the access of the productive sector to new technology.µExposer is a High Value UV exposing system designed for microfabrication applications. It allows the user to perform fast lithography processes on samples and substrates. The system consists of a UV 365nm parallel LED light source and a sliding tray where you can put your photolithography mask and sample to expose. A variety of custom holders and customizations can be provided for your application.
Specifications
|
Optics |
|
|
Wavelength |
365±5nm |
|
Exposure time |
0.1 - 100 s |
|
Exposure area |
100mm diameter |
|
Power density |
0.2 - 20 mW/cm^2 |
|
Homogeneity |
< 5% |
|
Light divergence |
< 2° |
|
Mechanics |
|
|
Size |
220x230x320 mm |
|
Weight |
9kg |
|
Power |
110v/220v 50w |
Features
- Long life LED based light source
- Parallel light optics
- 365nm wavelength
- Up to 4 inch wafers can be exposed
- Context-based navigation with buttons and a rotary encoder
- Very robust and easy to use
- Highly customizable for specific use scenarios
Applications
The microexposer is a robust system (all metal body structure), especially designed for easy use, low maintenance requirements and fast single layer device fabrication. Custom sample holders can be ordered for special substrates and samples, such as not flat or flexible substrates. The microexposer is ideal for scaling from lab fabrication to low volume commercial production.
PDFs
