Thin film
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Janis 1.5 K Continuous Closed Cycle Refrigerator Cryostat Applications: Semiconductors, Electronics, Electrical Characterization, ... Features: Cryogen free, Low temperature, ... Techniques: Electrical transport, Electrical transport, Thermal conductivity, ... -
Janis 10 K Closed Cycle Refrigerator Systems Applications: Nanoscience, Semiconductors, Spectroscopy, ... Features: , Cryogen free, ... Techniques: Thermal conductivity, Mossbauer spectroscopy, Electrical transport, ... -
Janis 4 K Closed Cycle Refrigerator Systems Applications: Thin films, Electrical Characterization, Semiconductors, ... Features: Vacuum, Cryogen free, ... Techniques: , Heat capacity, Optical spectroscopy, ... -
Lake Shore 8400 Series HMS Applications: Thin films, Electrical Characterization, Spintronics / magneto-electronics, ... Features: Magnetic fields, ... Techniques: Magnetometry, Electrical transport, Torque magnetometry, ... -
Lake Shore 8600 Series VSM Applications: Spintronics / magneto-electronics, Magnetoresistance, Magnetic properties, ... Features: Magnetic fields, ... Techniques: Magneto resistance, AC Susceptibility, Torque magnetometry, ... -
CS Instruments AFM Galaxy Dual Controller The GALAXY DUAL controller creates new opportunities for AFM users by combining new features with those already available on your existing AFM. This new controller offers more than a second life to your AFM, it renews and improves the performance with new imaging modes and new intuitive software. Applications: Spectroscopy, surface analysis, Electronics, ... Features: Non Destructive, No External Cooling Requirements, ... Techniques: Atomic Force Microscopy, Microscopy, ... -
J.A. Woollam Alpha-SE For routine measurements of thin film thickness and refractive index, this ellipsometer allows you to mount a sample, choose the model that matches your film, and press “measure”. You have results within seconds. Applications: Spectroscopy, surface analysis, Optical crystals, ... Features: , , ... Techniques: Spectroscopic ellipsometry, ... -
Montana Instruments CryoAdvance Setting a high standard of performance and usability in a closed-cycle optical cryostat, our Cryostation® s200 offers our largest sample chamber with patented vibration damping technologies to deliver exceptional thermal and vibrational performance without sacrificing ease-of-use. Applications: Optical crystals, Photon experiments, Spectroscopy, ... Features: Customizable chamber, Cooling System, ... Techniques: Magneto-Optic Kerr Effect (MOKE), Nanopositioners, Mossbauer spectroscopy, ... -
Montana Instruments CryoCore The CryoCore platform is built for researchers studying the optical and electrical properties of new materials and devices. The system offers full variable temperature control from 4.9K - 350K. Applications: Thin films, Spectroscopy, Semiconductors, ... Features: Magnetic fields, Vibration Stability, ... Techniques: Optical spectroscopy, Mossbauer spectroscopy, Nanopositioners, ... -
NanOsc Instruments CryoFMR for Cryostation Affordable turn-key variable temperature FMR spectroscopy from 2 to 18 GHz in Montana Instrument's Cryostation. Applications: Magnetoresistance, Spintronics / magneto-electronics, Spintronics / magneto-electronics, ... Features: Magnetic fields, Compact / Portable, ... Techniques: FMR spectroscopy, ... -
NanOsc Instruments CryoFMR for PPMS Affordable turn-key room-temperature FMR spectroscopy from 2 to 18 GHz. Applications: , Thin films, Magnetoresistance, ... Features: Temperature Control, Wave Guides, ... Techniques: FMR spectroscopy, ... -
Janis Cryogen Free Superconducting Magnet Systems Applications: Magnetoresistance, Nanoscience, Spintronics / magneto-electronics, ... Features: Cryogen free, Magnetic fields, ... Techniques: Magneto resistance, Thermal conductivity, Torque magnetometry, ... -
Montana Instruments Cryostation® s200 The CryoCore platform is built for researchers studying the optical and electrical properties of new materials and devices. The system offers full variable temperature control from 4.9K - 350K. Applications: Photon experiments, Spectroscopy, Optical crystals, ... Features: Cooling System, Vibration Stability, ... Techniques: Mossbauer spectroscopy, Nanopositioners, Optical spectroscopy, ... -
Coxem CX-200K The CX-200K is a standard yet powerful full-sized Scanning Electron Microscope (SEM) designed to meet a wide range of research and quality control needs. Featuring the all-new, intuitive NanoStation5 GUI, the CX-200K makes operation simple and efficient. With a maximum magnification of 500,000x, it delivers outstanding high-resolution imaging. Experience faster, optimized imaging and choose from a variety of options to customize the CX-200K to your specific requirements. The CX-200K combines advanced technology with ease of use, setting a new standard for basic yet powerful microscopy. Applications: Aerospace, Catalysis, Coating, ... Features: Ultra high sensibility, Correlative Analysis, ... Techniques: Scanning Electron Microscopy, Microscopy, ... -
Coxem CX-200Plus A full-size floor model Scanning Electron Microscope (SEM) that both new and experienced users will find suitable for many type of demanding research and quality control requirements. The standard supplied configuration of the CX-200plus includes both SE and BSE imaging detectors as well as an internal chamber view camera for easy stage tilt and height adjustments. The CX-200plus offers high resolution imaging capabilities at a very attractive price. After evaluating the CX-200plus, your search for the most cost effective solution will be an easy decision. Applications: Nanoscience, Coating, Electron Backscatter Diffraction, ... Features: Imaging, Vacuum, ... Techniques: Scanning Electron Microscopy, Microscopy, ... -
Coxem EM-30N The EM-30N is our most popular model of tungsten filament-based Tabletop SEM. Featuring our 5th generation DSP (Digital Signal Processing) technology it delivers crystal-clear, low noise images even at high magnification. Panorama Mode allows delivers wide-area scanning capability, while LV (Low Vacuum) gives you the ability to capture pristine, high-quality images of non-conductive samples without coating. The EM-30N is also the world’s first tabletop SEM that seamlessly integrates with compact EBSD, further elevating its versatility and performance. Applications: Nanoscience, surface analysis, Aerospace, ... Features: Ultra high sensibility, SEM Charge-up prevention, ... Techniques: Scanning Electron Microscopy, Microscopy, ... -
Coxem EM-40 The EM-40 represents COXEM's latest addition to their expanding family of Tabletop SEMs. The EM-40 comes with ultra-fast 5th-generation signal processing technology and provides high-quality imaging at frame rates of up to 13 fps. Four imaging modes (Fast, Slow, UltraFast, and Photo) allow the user to choose the image quality and speed that best fits their application. Applications: Thin films, Electron Backscatter Diffraction, Electronics, ... Features: Vibration Stability, Ultra high sensibility, ... Techniques: Scanning Electron Microscopy, Microscopy, ... -
Lake Shore EM-4V and EM-7V Electromagnets Applications: Nanoscience, Thin films, Semiconductors, ... Features: Magnetic fields, ... Techniques: Magnetometry, ... -
Quantum Design FusionScope FusionScope is an easy-to-use correlative microscopy platform designed from the ground up to add the benefits of SEM imaging to a wide range of AFM measurement techniques. Applications: Electronics, Material inspection, Nanoscience, ... Features: SEM Charge-up prevention, Ultra high sensibility, ... Techniques: Scanning Electron Microscopy, Atomic Force Microscopy, Nanopositioners, ... -
Quantum Design Microscopy FusionScope FusionScope is an easy-to-use correlative microscopy platform designed from the ground up to add the benefits of SEM imaging to a wide range of AFM measurement techniques. Applications: Finding new material, Electron Backscatter Diffraction, Coating, ... Features: Correlative Analysis, SEM Charge-up prevention, ... Techniques: Electron beam, Scanning Electron Microscopy, Professional Scientific and Technical Services, ...
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Arradiance GEMStar XT-P The GEMStar XT-DPTM Plasma Enhanced Atomic Layer Deposition (PEALD) system extends the capabilities of the GEMStar XTTM Thermal system to include best in class plasma processing through the full ... Applications: Magnetic properties, Magnetoresistance, Microscopy, ... Features: 300 Watt Air Cooled Direct ICP Head with four metal sealed mass flow controlled plasma gas inputs, 300 Watt Air Cooled Direct ICP Head with four metal sealed mass flow controlled plasma gas inputs, ... Techniques: , ... -
Arradiance GEMStar XT-R Not yet ready for PEALD development, the GEMStar XT-RTM Thermal Atomic Layer Deposition systems offers 300 °C (500 °C optional) ALD processing through the full range of substrates Applications: Magnetic properties, Catalysis, Magnetoresistance, ... Features: 300 Watt Air Cooled Direct ICP Head with four metal sealed mass flow controlled plasma gas inputs, Pulsed Vapor Push (PVPTM) to handle very low pressure material, ... Techniques: , ... -
Arradiance GEMStar XT-S The GEMStar XT-S/DTM Thermal Atomic Layer Deposition system offers 300 °C (500 °C optional) ALD processing through the full range of substrates, including Solar Cell ALD development. Applications: Optical crystals, Magnetic properties, Catalysis, ... Features: , Pulsed Vapor Push (PVPTM) to handle very low pressure material, ... Techniques: , ... -
Arradiance GEMStar-4 XT ™ Benchtop Atomic Layer Deposition Process Systems Applications: Magnetic properties, Thin films, Catalysis, ... Features: , 300 Watt Air Cooled Direct ICP Head with four metal sealed mass flow controlled plasma gas inputs, ... Techniques: , ... -
Arradiance GEMStar-6 XT ™ Benchtop Atomic Layer Deposition Process Systems Applications: Thin films, Thin films, Magnetic properties, ... Features: , , ... Techniques: , ...
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Arradiance GEMStar-8 XT PEALD ™ Benchtop Atomic Layer Deposition Process Systems Applications: Patterned magnetic media, Thin films, Microscopy, ... Features: Watchdog protection and EMO interface, Watchdog protection and EMO interface, ... Techniques: , ... -
Arradiance GEMStar-8 XT ™ Benchtop Atomic Layer Deposition Process Systems Applications: , Patterned magnetic media, Spectroscopy, ... Features: Pulsed Vapor Push (PVPTM) to handle very low pressure material, 300 Watt Air Cooled Direct ICP Head with four metal sealed mass flow controlled plasma gas inputs, ... Techniques: , ... -
HEX Series The HEX platform offers an unmatched level of user control and customization, designed to incorporate the latest thin film technologies and performance into a bench top PVD system. Applications: Semiconductors, Nanoscience, surface analysis, ... Features: Customizable chamber, HV, ... Techniques: Sputtering, Physical Vapor Deposition, ... -
Enlitech Image Sensor / Fingerprint-on-Display Testing The SG-A system is the world’s first commercial CMOS Image sensor tester. SG-A can provide the most comprehensive CMOS image sensor parameter characterizations. Applications: Photon experiments, Electronics, Electrical Characterization, ... Features: Imaging, Non Destructive, ... Techniques: Sensor Tester, ... -
J.A. Woollam M-2000 The M-2000 line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin film characterization. Applications: Quality control of the product, Optical crystals, Liquid crystal, ... Features: Low temperature, Wide Spectral Range, ... Techniques: Spectroscopic ellipsometry, ... -
Quantum Design Magnetic Property Measurement System - MPMS®3 The next generation of advanced SQUID magnetometry. Applications: Patterned magnetic media, Cryogen liquefaction, Spintronics / magneto-electronics, ... Features: Down to 1.8 K, Magnetic fields, ... Techniques: Heat capacity, Torque magnetometry, Thermoelectric Figure of Merit ZT, ... -
Measurement of Hall Effect and Sample Mobility Applications: Semiconductors, Electrical Characterization, Solar Energy, ... Features: Flexible System Integration, ... Techniques: Magneto resistance, Electrical transport, ... -
Durham Magneto Optics MicroWriter ML3 Baby A low-cost, desktop direct-write photolithography machine for rapid prototyping in R&D laboratories and small clean rooms Applications: Patterned magnetic media, Thin films, Aerospace, ... Features: Automation, Compact and easy-to-use, ... Techniques: Laser direct-write optical lithography, Laser direct-write optical lithography, ... -
Durham Magneto Optics MicroWriter ML3 Baby Plus The Baby Plus is our top selling machine and adds a number of features to the Baby which are usually only found in high-end machines. Applications: Thin films, Aerospace, Electronics, ... Features: Wave Guides, Long Service Life, ... Techniques: , Laser direct-write optical lithography, ...
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Durham Magneto Optics MicroWriter ML3 Mesa Applications: Semiconductors, Electronics, Patterned magnetic media, ... Features: Laser, Automation, ... Techniques: Laser direct-write optical lithography, Laser direct-write optical lithography, ...
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Durham Magneto Optics MicroWriter ML3 Pro Applications: Patterned magnetic media, Electronics, Thin films, ... Features: Compact and easy-to-use, Long Service Life, ... Techniques: Laser direct-write optical lithography, Laser direct-write optical lithography, ...
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Lake Shore Modular Characterization Systems Applications: Semiconductors, Thin films, ... Features: Magnetic fields, ... Techniques: Magnetometry, ... -
CS Instruments Nano-Observer AFM The Nano-Observer AFM microscope is a flexible and powerful AFM. Designed with the ultimate technologies, it combines performance and ease of use. Applications: Spectroscopy, surface analysis, Coating, ... Features: Imaging, ... Techniques: Microscopy, Atomic Force Microscopy, ... -
Durham Magneto Optics NanoMOKE3 an ultra-high sensitivity Kerr effect magnetometer Applications: , Magnetic properties, Exchange bias, ... Features: Automation, Temperature Control, ... Techniques: Magneto-Optic Kerr Effect (MOKE), ... -
ICSPI nGauge AFM Collect nanoscale topography data on your benchtop in three clicks with the nGauge AFM Applications: Intermetallics, Nano-Indentation, Fracture Mechanics, ... Features: Imaging, No External Cooling Requirements, ... Techniques: Atomic Force Microscopy, ... -
Quantum Design OptiCool - 7 Tesla Optical Cryostat Applications: Spintronics / magneto-electronics, Magnetic properties, Thin films, ... Features: Magnetic fields, Ultra high sensibility, ... Techniques: Microscopy, Optical spectroscopy, Magnetometry, ... -
Enlitech PERC/ HJT/ TOP-Con PV Cell Efficiency-Loss, Current-Loss, Voltage-Loss, and Fill-Factor-Loss Analysis Solution QE-R quantum efficiency system is a PV cell tester which can provide cell’s EQE. IPCE, IQE and spectral response data accurately and rapidly. Applications: Intermetallics, Electrical Characterization, Finding new material, ... Features: Compact / Portable, Customizable chamber, ... Techniques: Sensor Tester, ... -
NanOsc Instruments Phase FMR-40 Affordable turn-key room-temperature FMR spectroscopy from 2 to 40 GHz Applications: Magnetoresistance, Magnetoresistance, Magnetoresistance, ... Features: Compact / Portable, Compact / Portable, ... Techniques: FMR spectroscopy, ... -
NanOsc Instruments Phase FMR-8 Variable broadband FMR spectroscopy from 2 to 8 GHz with all Quantum Design PPMS platforms. Applications: , Magnetic properties, Magnetoresistance, ... Features: , Automation, ... Techniques: FMR spectroscopy, ... -
Quantum Design Physical Property Measurement System - PPMS® The QD most versatile instrument. Offering the widest range of magnetic, thermal and electrical measurements. Applications: Magnetoresistance, Cryogen liquefaction, Patterned magnetic media, ... Features: Magnetic fields, SQUID, ... Techniques: Thermoelectric Figure of Merit ZT, Torque magnetometry, AC Susceptibility, ... -
Quantum Design PPMS VersaLab™ A full suite of magnetic, thermal and electrical measurements in a portable, cryogen-free instrument. Applications: Magnetic properties, Magnetoresistance, Spintronics / magneto-electronics, ... Features: Helium-3 Refrigerator, SQUID, ... Techniques: Microscopy, AC Susceptibility, Thermal conductivity, ... -
Quantum Design PPMS® DynaCool™ PPMS performance and measurements in a new, cryogen-free design! Applications: Magnetic properties, Cryogen liquefaction, Spintronics / magneto-electronics, ... Features: SQUID, Cryogen free, ... Techniques: AC Susceptibility, Thermoelectric Figure of Merit ZT, Electrical transport, ... -
Janis Probe Stations Incorporating Magnets Applications: Semiconductors, Quantum optics, Electronics, ... Features: HV, Low temperature, ... Techniques: Magneto resistance, Magneto resistance, Magnetometry, ... -
Qnami ProteusQ™ Quantum Microscope Qnami ProteusQ is a complete quantum microscope system. It is the first scanning NV (nitrogen-vacancy) microscope for analyzing magnetic materials at the atomic scale. Applications: Magnetic properties, Coating, Intermetallics, ... Features: Correlative Analysis, Non Destructive, ... Techniques: Professional Scientific and Technical Services, Atomic Force Microscopy, ... -
Quantum Catalyzer Quantum Diamond Microscope State of the art, wide-field imaging of magnetic fields, with applications spanning geoscience, bioimaging, electronics, materials characterization, and quantum research. Applications: Quantum optics, surface analysis, Coating, ... Features: Magnetic fields, Vibration Stability, ... Techniques: Microscopy, Microscopy, ... -
J.A. Woollam RC2 The RC2 design builds on 25 years of experience. Applications: Quality control of the product, Coating, Thin films, ... Features: Low temperature, Imaging, ... Techniques: , , Spectroscopic ellipsometry, ... -
ICSPI Redux AFM Motorized AFM on your benchtop. Get the data you need even faster with Redux. Applications: Nanoscience, surface analysis, Microscopy, ... Features: Compact and easy-to-use, Compact / Portable, ... Techniques: Microscopy, Atomic Force Microscopy, ... -
Scienta Omicron Scienta Omicron ARPES Systems Applications: Microscopy, Chemical mapping, ... Features: Automation, Vacuum, ... Techniques: , , X-ray Photoelectron Spectroscopy (XPS), ... -
Scienta Omicron Scienta Omicron HiPP-Lab Applications: Microscopy, Chemical mapping, ... Features: Temperature Control, Automation, ... Techniques: X-ray Photoelectron Spectroscopy (XPS), X-ray Photoelectron Spectroscopy (XPS), X-ray Photoelectron Spectroscopy (XPS), ... -
Scienta Omicron Scienta Omicron MBE Systems Universal Compact Laboratory MBE Systems Applications: ... Features: Temperature Control, Automation, ... Techniques: X-ray Photoelectron Spectroscopy (XPS), X-ray Photoelectron Spectroscopy (XPS), X-ray Photoelectron Spectroscopy (XPS), ... -
Scienta Omicron Scienta Omicron NanoSAM Lab Chemical Analysis with Ultimate Resolution Applications: Microscopy, Chemical mapping, ... Features: , Automation, ... Techniques: , X-ray Photoelectron Spectroscopy (XPS), ... -
Scienta Omicron Scienta Omicron XPS Systems Applications: Chemical mapping, Microscopy, ... Features: Vacuum, Temperature Control, ... Techniques: X-ray Photoelectron Spectroscopy (XPS), X-ray Photoelectron Spectroscopy (XPS), X-ray Photoelectron Spectroscopy (XPS), ... -
Enlitech SS-PST100R AM1.5G Spectrum Adjustable Solar Simulator With the rapid development of high-efficiency tandem solar cells, especially perovskite/crystalline silicon tandem solar cells, the need for accurate measurement of the conversion efficiency of tandem cells has attracted a lot of attention. Applications: Electronics, Finding new material, Spectroscopy, ... Features: Customizable chamber, Imaging, ... Techniques: Solar Simulator, ... -
Janis ST-100 Optical Cryostat Applications: surface analysis, Semiconductors, Spectroscopy, ... Features: Temperature Control, Thermal Stability, ... Techniques: , Optical spectroscopy, Microscopy, ... -
Janis ST-500 Microscopy Cryostat Applications: Magnetic properties, Semiconductors, Fluorescence/Phosphorescence lifetime imaging, ... Features: Magnetic fields, HV, ... Techniques: Microscopy, Optical spectroscopy, Magneto resistance, ... -
Janis STVP-100 Optical Cryostat Applications: Microscopy, Spectroscopy, Photon experiments, ... Features: Low temperature, Vacuum, ... Techniques: Microscopy, Microscopy, ... -
Janis SuperTran Continuous Flow Cryostat Systems - Sample in Vacuum Applications: Nanoscience, Spectroscopy, Intermetallics, ... Features: Temperature Control, Thermal Stability, ... Techniques: , Microscopy, Optical spectroscopy, ... -
Janis SuperTran-VP Continuous Flow Cryostat Systems - Sample in Vapor Applications: Fluorescence/Phosphorescence lifetime imaging, Semiconductors, Spectroscopy, ... Features: Vacuum, Low temperature, ... Techniques: Optical spectroscopy, Optical spectroscopy, ... -
Janis SuperVariTemp Cryostat Systems - Sample in Flowing Vapor Applications: Intermetallics, Fluorescence/Phosphorescence lifetime imaging, Thin films, ... Features: Low temperature, Vacuum, ... Techniques: , Optical spectroscopy, ... -
Janis SVT-400 High-efficiency Cryostat Applications: Thin films, Electrical Characterization, Fluorescence/Phosphorescence lifetime imaging, ... Features: Low temperature, Vacuum, ... Techniques: , Mossbauer spectroscopy, Mossbauer spectroscopy, ... -
Janis Ultra High Vacuum (UHV) Micromanipulated Probe Stations Applications: Magnetoresistance, Semiconductors, Spintronics / magneto-electronics, ... Features: Magnetic fields, Low temperature, ... Techniques: Optical spectroscopy, Electrical transport, ... -
Janis VariTemp (VT-200) Applications: Electrical Characterization, Semiconductors, Nanoscience, ... Features: Vacuum, Low temperature, ... Techniques: Electrical transport, Optical spectroscopy, Nuclear magnetic resonance (NMR), ... -
Janis VNF-100 Cryostat System - Sample in Flowing Vapor Applications: Thin films, Fluorescence/Phosphorescence lifetime imaging, Intermetallics, ... Features: Low temperature, Vacuum, ... Techniques: , ... -
Janis VPF Series Cryostat Systems - Sample in Vacuum Applications: Fluorescence/Phosphorescence lifetime imaging, Electrical Characterization, Nanoscience, ... Features: Vacuum, Low temperature, ... Techniques: Optical spectroscopy, Microscopy, Electrical transport, ... -
Scienta Omicron VT SPM Scienta Omicron is the leading innovator in Surface Science. The company provides top capabilities for the research community through its technology leadership in electron spectroscopy, scanning probe microscopy and thin film deposition. These capabilities are available in custom tailored solutions from one source with worldwide sales and service groups. Applications: Patterned magnetic media, Microscopy, Magnetic properties, ... Features: In-situ tip exchange, Vibration Stability, ... Techniques: X-ray Photoelectron Spectroscopy (XPS), X-ray Photoelectron Spectroscopy (XPS), Microscopy, ... -
Zahner-Elektrik Zennium X The ZENNIUM X is a modular potentiostat / galvanostat including a frequency response analyzer (FRA). The ZENNIUM X potentiostat offers 32 bit DC resolution and 24 bit AC resolution across 12 different current ranges, which enables it to carry out outstandingly precise and accurate measurements. Nine extension slots allow versatile customization of the potentiostat for use in different fields of electrochemistry. Applications: Semiconductors, Intermetallics, Finding new material, ... Features: Compact / Portable, No External Cooling Requirements, ... Techniques: ... -
Mutech Microsystems µAligner µAligner is a compact high value UV mask aligner designed for microfabrication applications. Applications: Spintronics / magneto-electronics, Thin films, Patterned magnetic media, ... Features: Remote Access, Compact / Portable, ... Techniques: Computer and Electronic Product Manufacturing, Professional Scientific and Technical Services, Air Transportation, ... -
Mutech Microsystems µCoater µCoater is a very easy to use and full of features benchtop spin coater, it includes an integrated vacuum system with a rotating vacuum chuck for holding the substrates to coat while spinning. Applications: Thin films, Spintronics / magneto-electronics, Electronics, ... Features: Remote Access, Compact / Portable, ... Techniques: Laser direct-write optical lithography, ... -
Mutech Microsystems µExposer µExposer is a High Value UV exposing system designed for microfabrication applications. It allows the user to perform fast lithography processes on samples and substrates. Applications: Spintronics / magneto-electronics, Aerospace, Electronics, ... Features: Laser, Compact / Portable, ... Techniques: Laser direct-write optical lithography, ... -
Mutech Microsystems µLaser µLaser is a high value direct laser lithography writer, oriented to universities and research facilities looking to expand their capabilities. Applications: Semiconductors, Patterned magnetic media, Electronics, ... Features: Stand-Alone Design, Compact / Portable, ... Techniques: Laser direct-write optical lithography, ...